INTRODUCTION

CMOS based MEMS sensors have been widely accepted by the industries due to its monolithically capability with the existing CMOS technology. These sensors can be easily integrated with the standard CMOS ICs for various application especially in IoT spectrum. This short course is intended to introduce to the beginner the CMOS-MEMS technology itself together with several example of device design and simulation using industrial software such as CoventorWare. This course will also include CMOS-MEMS designer from the industry which will talk about his experience in designing the actual CMOS-MEMS resonator using a standard CMOS technology.